Multi Horizontal Wafer Canister

•The inner ring design can effectively minimizes lateral movement
without applying compression on wafer edges.
•Lower lid inner ring finger design to improve aseismic strength.
Interfaces with industry robtic handling equipment.
•Secure 4 latches system and inner side impact resistant space
design provide effective protection for wafer transportation process.
•The design can effectively reduce the overall weight while beautifying
the appearance.
•The font is concave below the surface, effectively avoiding the risk
of breaking HDPE bags during transportation.

Multi Horizontal Wafer Canister part numbers and ordering information:
Wafer
Size
SemiGlory
Order
Code
Material Internal
Diameter
For wafer
Thickness
Loading
Quantity
Standard
Packing
Quantity
6" 6001AWBL Anti-static PP 151mm All 25PCS 16 PCS/carton
8" 6002AWBL Anti-static PP 201mm All 25PCS 16 PCS/carton
12" 6003AWBL Anti-static PP 301mm All 25PCS 8 PCS/carton
LPC Test/Typical
Particle Size(um) Particle quantity on surface of sample(piece/cm2)
≥ 0.3 1021
≥ 0.5 121
IC Test/Typical
Ion F- Cl- Br- NO2- NO3- SO42- PO43- Na+ NH4+ K+ Mg2+ Ca2+
Test Result(ug/g) ND 2.147 1.424 ND 1.252 ND ND 2.175 1.853 ND ND ND
Spec.(ug/g) <10 <10 <10 <10 <30 <10 <80 <15 <20 <15 <15 <20
Outgassing/Typical
Volatile Organic Compounds detected Result(ug/g)
Total Outgassing 30.15

Multi Horizontal Wafer Jar

•The upper and lower covers are designed to facilitate the operator's
opening and ensure the secure during transportation.
•Foam liner/isolator packaging is used to improve the shock-proof ability
and provide effective protection for wafer transportation.
•Provide conductive PP and non conductive PP materials to facilitate
customer choice.
•The design can effectively reduce the overall weight while beautifying
the appearance.
•The font is concave below the surface, effectively avoiding the risk
of breaking HDPE bags during transportation.

Semiglory can also provide the same product in Anti-static PP.
Wafer
Size
SemiGlory
Order
Code
Material Internal
Diameter
For wafer
Thickness
Loading
Quantity
Standard
Packing
Quantity
4" 6057AWNP Natural PP 111mm All 25PCS 120 PCS/carton
5" 6007AWNP Natural PP 167mm All 25PCS 40 PCS/carton
8" 6009AWNP Natural PP 235mm All 25PCS 36 PCS/carton
LPC Test/Typical
Particle Size(um) Particle quantity on surface of sample(piece/cm2)
≥ 0.3 1040
≥ 0.5 135
IC Test/Typical
Ion F- Cl- Br- NO2- NO3- SO42- PO43- Na+ NH4+ K+ Mg2+ Ca2+
Test Result(ug/g) ND 2.254 1.378 ND 2.364 ND ND 2.136 1.369 ND ND ND
Spec.(ug/g) <10 <10 <10 <10 <30 <10 <80 <15 <20 <15 <15 <20
Outgassing/Typical
Volatile Organic Compounds detected Result(ug/g) Anti-static PP Result(ug/g)
Total Outgassing 7.04 30.15

Multi Vertical Wafer Shipper

•Interfaces with industry robotic handling equipment.
•Spring design minimizes lateral movement and particle generation.
•The combination design can effectively prevent cassette from moving.
•The design can effectively reduce the overall weight while beautifying the appearance.

Note:The difference between 6072AWNP and 6012AWNP is the slot pitch
Wafer
Size
SemiGlory
Order
Code
Material For wafer
Thickness
Internal
Diameter
Loading
Quantity
Standard
Packing
Quantity
2" 6010AWNP Natural PP 400-800um 50mm 25PCS 90 PCS/carton
3" 6011AWNP Natural PP 400-800um 75mm 25PCS 70 PCS/carton
4" 6012AWNP Natural PP 500-800um 100mm 25PCS 36 PCS/carton
4" 6072AWNP Natural PP 500-800um 100mm 25PCS 36 PCS/carton
6" 6013AWNP Natural PP 600-1000um 150mm 25PCS 30 PCS/carton
6" 6071AWNP Natural PP 1000-1400um 150mm 25PCS 30 PCS/carton
8" 6014AWNP Natural PP 600-1000um 200mm 25PCS 4 PCS/carton
LPC Test/Typical
Particle Size(um) Particle quantity on surface of sample(piece/cm2)
≥ 0.3 929
≥ 0.5 124
IC Test/Typical
Ion F- Cl- Br- NO2- NO3- SO42- PO43- Na+ NH4+ K+ Mg2+ Ca2+
Test Result(ug/g) ND 1.027 0.356 ND 0.474 ND ND 1.153 0.571 ND ND ND
Spec.(ug/g) <10 <10 <10 <10 <30 <10 <80 <15 <20 <15 <15 <20
Outgassing/Typical
Volatile Organic Compounds detected Result(ug/g)
Total Outgassing 7.04

Single Horizontal Wafer Canister

•The switch direction logo design on upper cover to facilitate users to load or remove wafers
•The buckle position matching design which effectively avoids the problem of the upper cover.
falling out during the transportation process.
•Spring design minimizes lateral movement and particle generation.

Multi Horizontal Wafer Jar part numbers and ordering information:
Wafer
Size
SemiGlory
Order
Code
Internal
Diameter
Material For wafer
Thickness
Loading
Quantity
Standard
Packing
Quantity
3 " 6073AWNP 78mm Natural PP All 1PCS 400 PCS/carton
3" 6017AWNP 78mm Natural PP All 1PCS 400 PCS/carton
4" 6018AWNP 104mm Natural PP All 1PCS 200 PCS/carton
6" 6019AWNP 175mm Natural PP All 1PCS 120 PCS/carton
12" 6020AWNP 301mm Natural PP All 1PCS 12 PCS/carton
LPC Test/Typical
Particle Size(um) Particle quantity on surface of sample(piece/cm2)
≥ 0.3 929
≥ 0.5 124
IC Test/Typical
Ion F- Cl- Br- NO2- NO3- SO42- PO43- Na+ NH4+ K+ Mg2+ Ca2+
Test Result(ug/g) ND 1.027 0.356 ND 0.474 ND ND 1.153 0.571 ND ND ND
Spec.(ug/g) <10 <10 <10 <10 <30 <10 <80 <15 <20 <15 <15 <20
Outgassing/Typical
Volatile Organic Compounds detected Result(ug/g)
Total Outgassing 7.04

Flex frame and Felx frame shipper

•PPS fiber material provides enough strength and toughness to support blue
film to carry wafers.
•Mirror-surface treated to ensure blue film is attached without bubbles
and peeling off.
•Spring design in the upper cover can effectively avoid the bandage frame
movement,
prevent wafer breakage, minimize particle generation.

Semiglory can also provide the same Flex frame shipper in natual PP.
Wafer
Size
SemiGlory
Order
Code
Surface
Resistance
Internal
Diameter
Internal
Height
Standard
Packing
Quantity
6" 6021RWBL N/A 194mm 2.5mm 200 PCS/carton
8" 6023RWBL N/A 250mm 2.5mm 100 PCS/carton
8" 6024RWBL N/A 250mm 2.5mm 100 PCS/carton
6" 6026AWBL 104~1011 216mm 63mm 10 PCS/carton
8" 6027AWBL 104~1011 276mm 63mm 10 PCS/carton
8" 6028AWBL N/A 276mm N/A 8 PCS/carton
12" 6029AWBL 104~1011 350mm 71mm 10 PCS/carton
LPC Test/Typical
Particle Size(um) Particle quantity on surface of sample(piece/cm2)
≥ 0.3 929
≥ 0.5 124
IC Test/Typical
Ion F- Cl- Br- NO2- NO3- SO42- PO43- Na+ NH4+ K+ Mg2+ Ca2+
Test Result(ug/g) ND 1.027 0.356 ND 0.474 ND ND 1.153 0.571 ND ND ND
Spec.(ug/g) <10 <10 <10 <10 <30 <10 <80 <15 <20 <15 <15 <20
Outgassing/Typical
Volatile Organic Compounds detected Result(ug/g)
Total Outgassing 7.04

Metal flex frame

 

 
Wafer
Size
SemiGlory
Order
Code
Meterial Internal
Diameter
Thickness Standard
Packing Quantity
Remark
6" 6070RWGY metal 192.5mm 1.22mm 50PCS/carton METAL FILM FRAME 6 INCH KNS STD
6" 6069RWGY metal 194mm 1.22mm 50PCS/carton METAL FILM FRAME 6 INCH DISCO STD
8" 6068RWGY metal 243.3mm 1.22mm 50PCS/carton METAL FILM FRAME 8 INCH KNS STD
8 " 6067RWGY metal 250mm 1.22mm 50PCS/carton METAL FILM FRAME 8 INCH DISCO STD
12" 6066RWGY metal 350mm 1.5mm 50PCS/carton METAL FILM FRAME 12 INCH DISCO STD

Ring Separator

•Double sided design to ensure the operation is simple and quick.
•The separater only contacts wafer periphery to ensure no scratches
on the wafer and provide effective protection during wafer transportation.
•Surface etching design of the ring separator to effectively avoid adhesion to the wafer.

Flex frame and Felx frame shipper part numbers and ordering information:
Wafer
Size
SemiGlory
Order
Code
Material Surface
Resistance
Outer
Diameter
Internal
Height
Standard
Packing
Quantity
6" 6030RWBL Anti-static PP 104~1011 150mm 1.25mm 900 PCS/carton
8" 6031RWBL Anti-static PP 104~1011 200mm 1.25mm 2500 PCS/carton
12" 6032RWBL Anti-static PP 104~1011 300mm 3.75mm 200 PCS/carton

Cushion Disc & Liner and Paper Separator

•The foam and Sponge materials meet the EU RoHS/REACH directive and the world environmental regulations.
•The foam are all anti-static closed-cell polyethylene materials;
 the wafer separator use Dupont Tyvek paper,
 the foam and Tyvek paper are all anti-static materials;
 the surface resistance is 106-1011.
•Apply to wafer Canister and wafer Jar.
•Semiglory can also provide product customization.

Cushion Disc
Wafer Size SemiGlory Order Code Materials Diameter
4" 6055FC-PK / WH / NP Foam / Paper / PET 100mm
5" 6045FC-PK / WH / NP Foam / Paper / PET 125mm
6" 6046FC-PK / WH / NP Foam / Paper / PET 150mm
8" 6047FC-PK / WH / NP Foam / Paper / PET 200mm
8" 6048FC-PK / WH / NP Foam / Paper / PET 275mm
12" 6049FC-PK / WH / NP Foam / Paper / PET 300mm
Cushion Liner
Wafer Size SemiGlory Order Code Materials Cushion Dimensions
4" 6076FCPK Foam / sponge 342*31mm
5" 6042FCPK Foam / sponge 435*37mm
6" 6043FCPK Foam / sponge 518*37mm
8" 6044FCPK Foam / sponge 712*50mm

Hoop Ring

•The inner and outer rings correspond to R rounded corners to clamp the blue film. The R angle effectively avoids the scratch or rupture of the blue film.
•The interference fit of inner and outer rings ensures that the blue film is effectively fixed and will not loosen.
•PC + fiber material is used to ensure Ring's good elasticity and toughness. It can be used repeatedly without breaking.

Flex frame and Felx frame shipper part numbers and ordering information:
Wafer
Size
SemiGlory
Order
Code
Material Surface
Resistance
Internal
Diameter
Standard
Packing
Quantity
6" 6059AWGR PC+GF N/A 140mm 200 PCS/carton
7 6060AWBU PC+GF N/A 170mm 200 PCS/carton
8" 6080AWGR PC+GF N/A 195mm 200 PCS/carton
9" 6081AWBU PC+GF N/A 225mm 200 PCS/carton

Mask Package

•The mask package provides a single piece of 6-inch mask with great protection during shipping and storage.The package is made from the electrostatic dissipative material to prevent the mask from the electrostatic discharge damage. With the shock-proof mask support, this type of package can reduce particle generation effectively during transportation.

Mask Package
Wafer
Size
SemiGlory
Order
Code
Internal
Size
Internal
Height
Materials Standard
Packing
Quantity
6" 6025AWOG 152.4*152.4mm 6.35mm Anti-static ABS 30PCS/carton

Precision injection parts for semiconductor equipment

•We can produce high precision injection molding products & mechanical products for semiconductor equipment according to customers' requirements. The products can meet the high flatness and other shape requirements, we are equipped with three-coordinate inspection to ensure product quality.

In-process Cassette

•Available in multiple colors for process identification.
•Open slots for easy cleaning.
•Available in multiple material such as PP/PVDF/PFA for different chemical resistence of customer.

Series
Wafer
Size
SemiGlory
Order Code
Material Internal
Diameter
Standard
Packing Quantity
4" 6062CW Anti-static PP/PVDF/PFA 101.5mm 36 PCS/carton
6" 6063CW PP/PVDF/PFA 152mm 18 PCS/carton
8" 6065CW PP/PVDF/PFA 202mm 8 PCS/carton

Blister products

• Separate packaging for 6 inch hoop ring
• Made of original PS material, no recycled material is added, the material is of high purity and less particles.

Series
Hoop Ring Size SemiGlory
Order Code
Material Internal Diameter Surface resistance Standard
Packing Quantity
6" 6074ACBL Anti-static PS 152mm 105-1011 120PCS/carton